| 参考文献 1 E.du Trémolet de Lacheisserie,K.Mackay,J.Betz,et al.From Bulk to Film Magnetostri-ctive Actuators.Journal of Alloys and Compounds, 1998;275~277:685~691 2 Quanmin Su,Taesung Kim,Yun Zheng,et al.Thin Film composite actuators.SPIE,1995;2441:179~184 3 Mitsuhiro Wada,Haru-Hisa Uchida,Yoshihito Matsumura,Hirohisa Uchida ,et al.Prepa-ration of films of (TB,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process and their characterization.Thin Solid Films, 1996;281~282(1~2):503~506 4 K.I.Arai,T.Honda,and M.Yamaguchi.Microactuators Using Magnetostrictive Thin Fil- ms.日本应用磁学会志,1994;18(5):386~391 5 Takashi HONDA,Nonmember,Ken Ichi ARAI,et al.Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films.IEICE TRANS.ELECTRON.,1997;E80-C(2):232~237 6 T.Honda,Y.hayashi,M.Yamaguchi ,et al.Fabrication of Thin-Film Actuators Using Ma-gnetostriction. 日本应用磁学会志, 1994;18(2):477~480 7 T.Honda and K.I.Arai.Driving.Principles for Magnetic Thin-Film Cantilevers.日本应 用磁学会志, 1997;21(4-2):817~820 8 E.Quant,K.Seemann.Fabrication and Simulation of Magnetostrictive Thin-film Actuat-ors.Sensors and Actuators , 1995;A50(1~2):105~109 9 E.Quandt.Giant magnetostrictive thin film materials and applications. Journal of All-oys and Compounds, 1997;258:126~132 10 T.Honda and K.I.Arai.Basic Properties of a Walking Micro-Mechanism Using Mag- netostrictive Thin Films.日本应用磁学会志, 1996;20(2):537~540 11 S.H.Lim,S.H.Han,H.J.Kim,et al.Prototype microactuators Driven by Magnetostrictive Thin Films.IEEE Trans.Magn., 1998;34(4)2042~2044 12 H.Uchida,M.Wada,K.Koike,et al.Giant Magnetostrictive Materials:thin film formation and application to magnetic surface acoustic wave devices.Journal of Alloys and Compounds, 1994;211~212:576~580 13 E.Quandt,A.Ludwig,J.Mencik,et al.Giant magnetostrictive TB/Fe/Fe multilayers. Journ-al of Alloys and Compounds, 1997;258:133~137 14 Alejandro G.Schrott and Robert J.von Gutfeld.Magnetic Arrays and Their Resonant Frequencies for the Production of Binary Codes.IEEE Trans.Magn., 1998;34(5):3765~3771 Current Study on Giant Magnetostrictive Thin Film Microactuators Abstract: Giant Magnetostictive thin film is a new type of actuating components with high property.Based on many references,the article introduces the actuating principle of Giant magnetostictive thin film,dicusses the late research results of giant magnetostrictive thin film microactuators.Emphasis on the apply to microfluid control system,linear ultrasonic micromotor and micro walking mechanism.Put forward the progress of giant magnetostictive thin film in microactuators. Key words:giant magnetostictive ; microactuator ; thin film |